ProductsElectronic Materials - ArF monomer material
ArF photoresist resin monomers are mainly acrylate series products. Product quality: high purity, low metal impurities, low polymer, low moisture. Meet the main KrF and ArF photoresist resin production needs.
| Category | Abbreviation | Reference standards |
|---|---|---|
| ArF monomer material | HAMA | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | MAMA | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | EAMA | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | MCPMA | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | MNBL | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | GBLMA | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | SMA---AMA | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | AHA | Purity >99.5%，Metal impurity <10ppb |
| ArF monomer material | IPAA | Purity >98%，Metal impurity <10ppb |
| ArF monomer material | YB---EAA | Purity >98%，Metal impurity <10ppb |
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